The MKS Plasma Process Training System (PPTS-1A) was developed as a collaboration between MKS Instruments, Manitou Systems and Portland (OR) Community College (PCC). PCC developed the curriculum content. Manitou Systems provided a 100 watt generator with integrated matching network and the chamber with substrate holder and magnetron. MKS provided the various measurement and control instruments, pump and other components that were required to integrate the assembly.

Above: The picture shows the various components of the PPTS-1A. One MFC is used for non-reactive sputtering with argon. A second MFC could be provided for reactive sputtering with, for example, oxygen or nitrogen. Control method was downstream with ratio control for reactive sputtering.

PPTS-1A Manual and Lab Notes

MKS PPTS-1A Manual: This dates from October 2008. This is the final version of the manual.

The following Lab Notes are informal documents, never officially released.

PPTS Lab 1: Familiarization with the MKS PPTS-1A Plasma Trainer.

PPTS Lab 2: Copper Sputtering - Variations in Process Parameters.

PPTS Lab 3: Copper Sputtering - Variations in Process Gas.

The manual refers to the Windows software for the Type 146 controller. This is locked to the specific configuration of the Type 146 controller that was supplied with the PPTS. The software was for educational use only.

I want to thank MKS for permission to place the manual on this web site. Note that MKS owns all intellectual property in the manual and that the material is presented "as is" and "where is" and MKS has no other express warrantees.

Note on the 146 Controller

The 146 instrument is now obsolete. There all alternatives.

Contact me for further details on the above.

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