The history of vacuum teaching apparatus goes back
to the 1600s. In the 19th and through most of the 20th
centuries the common configuration was a pump (hand or motor driven), a glass
belljar and baseplate, and perhaps a mercury manometer or other gauge. In the
1980s Edwards High Vacuum introduced a nice educational package consisting of a
small diffusion pump and a set of accessories appropriate for the physics
lecture hall and lab
In the 1990s a number of two year colleges in USA
began to introduce formal curricula to prepare students for process and
equipment support positions in semiconductor factories. The "standard"
curriculum has included one to two semesters on vacuum and plasma processes.
The focus has expanded to include related areas such as nanotechnology and
other fields that require advanced manufacturing techniques. A gathering ground
for information and curricula is the Maricopa
Advanced Technology Education Center in Phoenix, AZ.
Since the mid 1990s two companies have been
prominent in the supply of vacuum education packages to the colleges, Varian
Vacuum and MKS Instruments. A newcomer on the block is The Science Source and
its Daedalon unit. The American Vacuum Society also has a long history of
providing teacher education and vacuum equipment through its long-standing
annual Science Educators Workshops. (Please see the High School topic area for
more on this program.)
The following paragraphs provide a brief overview
of these systems along with some links where more information can be found.
Vacuum Education at the Tech College
Level
Varian Vacuum Products Vacuum Trainer.
Introduced around 1995 this system was the first of the "modern" industrial
vacuum trainers. The foundation was a Varian turbopump station with an added
glass belljar and a variety of gauges. Other features included a leak valve and
a controller with an RS232 computer interface. Common additions included
sputtering fixturing for RF process familiarization. The Varian system
disappeared from the market around 2000. Further information may be found at
the following link:
David M. Hata's paper
Vacuum Systems
Laboratory Development
MKS Instruments VTS-1B Vacuum Training
System. This product followed closely on the heels of the Varian trainer
and remains in the catalog. The VTS-1B is provided as a set of kits of varying
complexity and functionality. A book containing set up instructions and about
30 exercises is included with the system. A companion product is the Plasma
Process Training System (PPTS-1A). This is a table-top sputtering system
with 6" chamber, 4" magnetron cathode, high vacuum pumping system, flow
controllers for gas introduction, gauges and a pressure controller. Further
information on the MKS offerings may be found at the following links:
Product
Overview at the MATEC site
Student Lab
Worksheets prepared by Austin Community College
MKS Datasheet for the
VTS-1B
Article
Vacuum Training
for Manufacturing: Why and How
Article
Technician-Level Plasma
Technology Training
University of Salford (UK)
M. Sc.
programme in Vacuum Engineering
The Science Source/Daedalon Vacuum Principles
and Applications Laboratory (VPAL-A). This is a newcomer with broad
capabilities at a relatively modest price. The datasheet may be viewed
here. Now being
introduced is a high school level vacuum system the VPAL-B (Basic). Both of
these products are supported with substantial documentation.
Vacuum Education at the High School
Level
Vacuum equipment is frequently found in high school
physics labs, and occasionally will be found in lower grades. Frequently this
equipment is in the form of single purpose demonstration equipment (Magdeburg
hemispheres, "penny and feather" tubes, etc.) or may consist of a pump with a
baseplate and glass or plastic chamber. Documentation is often sparse,
especially with the pump/baseplate apparatus and teachers often do not have
information with which to more fully utilize the equipment. It's a pity to have
a $2,000 asset and only use it to expand balloons and marshmallows. Below are
listed some of the more commonly found high school level equipment and
resources.
American Vacuum Society Science Educators
Workshop. This has to rate high on the list as the AVS has done an
excellent job physics teachers through their workshops and equipment grants.
Participants in the annual workshops receive a grant for a basic vacuum system
consisting of an integrated pump, belljar and mechanical gauge. Program
description and link to workshop documentation may be found
here.
The following are links to typical vacuum equipment
offerings that are offered by science supply companies. (These links may change
over time due to the fluid nature of on line catalogs.)
Vacuum Base
Plate
Typical
Pump/Baseplate Combo
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