| This page serves to provide an overview of the
Vacuum Training System (VTS-1B) as was manufactured and marketed by MKS Instruments of Andover, Massachusetts. Please feel free contact me if
you need information or support concerning an existing system.
Above: The base VTS-1B consisted of a medium vacuum (mechanical pump) system with direct (capacitance diaphragm) and indirect (convection Pirani) gauges, a mass flow controller, a motor-driven throttle valve and control and display electronics (MKS Type 146). Also supplied was a pumped and sealed hot cathode ion gauge.
Above: The full system added a high vacuum pump, 100 amu residual gas analyzer, sampling orifice and an ion gauge.
MKS VTS-1A Manual: This is Rev. D and dates from October 2008. This is the final version of the MKS VTS-1B manual.
The manual contains details for the installation and use of the DOS 146 RTI (Remote Terminal Interface) software as well as the later Windows software. The latter is locked to the specific configuration of the Type 146 controller that was supplied with the VTS. Both versions of software were for educational use only and not appropriate for industrial applications.
I want to thank MKS for permission to place the manual on this web site. Note that MKS owns all intellectual property in the manual and that the material is presented "as is" and "where is" and MKS has no other express warrantees.
Note on the 146 Controller
The 146 instrument is now obsolete. There all alternatives.
Contact me for further details.
Copyright © 1992-2019 Stephen P. Hansen